
描述
TRION PHANTOM RIE (Upgradable to MINILOCK RIE) Installed and running Chiller included配置
Can hold up to an 8" wafer Gasses: SF6, CF4, O2 Windows 3.1 Automatic temp control unit Vacuum Load Lock Down stream upgradeOEM 代工型號說明
未提供文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 12 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
141653
晶圓尺寸:
6"/150mm, 8"/200mm
年份:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TRION
PHANTOM II
類別
Dry / Plasma Etch
上次驗證: 12 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
141653
晶圓尺寸:
6"/150mm, 8"/200mm
年份:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
TRION PHANTOM RIE (Upgradable to MINILOCK RIE) Installed and running Chiller included配置
Can hold up to an 8" wafer Gasses: SF6, CF4, O2 Windows 3.1 Automatic temp control unit Vacuum Load Lock Down stream upgradeOEM 代工型號說明
未提供文檔
無文檔