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TRION MINILOCK
    描述
    RIE Single Wafer Plasma Metal Etcher 8” (dia.) Chuck RFX-600 RF Generator, 13.56 MHz Automatic RF Matching Network Vacuum Loadlock 4ea Mass Flow Controllers 100 sccm O2 100 sccm CF4 50 sccm Cl2 100 sccm BCl3 PC Process Controller Color Touch Screen Graphical User Interface
    配置
    無配置
    OEM 代工型號說明
    The Minilock system incorporates a vacuum load-lock in a compact table top console. The system has been designed to meet all the safety and equipment needs for the more challenging processes in the laboratory environment. Its modular design and optional gas cabinet provide the user with a turnkey system that meets your safety, facility and processing needs. The Minilock is suitable for anisotropic etching of aluminum, silicides, gallium arsenide and other materials requiring chlorinated chemistries. It is also suitable for anisotropic etching of silicon dioxide, silicon nitride and other materials requiring high selectivity and a controlled anisotropic etch. The system specifications are 35"Wx26"Dx48"H with RF Power of 600 watt, 13.56 MHz and up to 6 Mass Flow Controllers. The maximum wafer size is up to 8".
    文檔

    無文檔

    TRION

    MINILOCK

    verified-listing-icon

    已驗證

    類別
    Dry / Plasma Etch

    上次驗證: 超過60天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    12010


    晶圓尺寸:

    8"/200mm


    年份:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    TRION MINILOCK

    TRION

    MINILOCK

    Dry / Plasma Etch
    年份: 1995條件: 二手
    上次驗證超過60天前

    TRION

    MINILOCK

    verified-listing-icon
    已驗證
    類別
    Dry / Plasma Etch
    上次驗證: 超過60天前
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/PjfY6G99W3yj5XeyZkMDlr_GOXV9JYbfKnfiCDzI4Zw_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/W3g31xiEUEyTlDKAVQzCq1A-q8De8OOsSE2f7CuyCkE_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/w94r2jiHnVhsgsqF0sr1tUYpaVex_fWnaRJFjHp-3OU_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/VOx47fda_If0GnyLNM4Kz8itWGU4Rznc8zbW6wvYDTM_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/UAmTbyoCMHyptIhUwRACs8KXtqTS0144tjkILCch5zQ_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/nZgRrZV4KF3kUL5aH-u2BjZqbao1dAf4E_Olr4pbeY8_20190315_091716_f
    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    12010


    晶圓尺寸:

    8"/200mm


    年份:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    RIE Single Wafer Plasma Metal Etcher 8” (dia.) Chuck RFX-600 RF Generator, 13.56 MHz Automatic RF Matching Network Vacuum Loadlock 4ea Mass Flow Controllers 100 sccm O2 100 sccm CF4 50 sccm Cl2 100 sccm BCl3 PC Process Controller Color Touch Screen Graphical User Interface
    配置
    無配置
    OEM 代工型號說明
    The Minilock system incorporates a vacuum load-lock in a compact table top console. The system has been designed to meet all the safety and equipment needs for the more challenging processes in the laboratory environment. Its modular design and optional gas cabinet provide the user with a turnkey system that meets your safety, facility and processing needs. The Minilock is suitable for anisotropic etching of aluminum, silicides, gallium arsenide and other materials requiring chlorinated chemistries. It is also suitable for anisotropic etching of silicon dioxide, silicon nitride and other materials requiring high selectivity and a controlled anisotropic etch. The system specifications are 35"Wx26"Dx48"H with RF Power of 600 watt, 13.56 MHz and up to 6 Mass Flow Controllers. The maximum wafer size is up to 8".
    文檔

    無文檔

    類似上架商品
    查看全部
    TRION MINILOCK

    TRION

    MINILOCK

    Dry / Plasma Etch年份: 1995條件: 二手上次驗證:超過60天前