描述
SCCM Details Attached配置
LoadLock Door - Open & Close Cylinder: AGV Wafer Type - Notch/Flat Zone: Flat E-Chuck Type - Polymide/Ceramic: Ceramic ESC 8" Caassette - Cassette (inch & Condition) 8" Monitor - Operation Monitor State: Side Position Laser Sensor/ Mapping - Visual: OK Pen - Touch screen pen: Ok Touch Screen - Touch Film: OK Signal Tower: - Maker/Model: PATLITE/SLF-V - Visual R/Y/G/B: R/Y/G/B Door Safty Sensor - Visual: 2System Robot: Maker: Yaskawa Ass'y Type - VS2A / VS2B: VS2A ASSY TRANSFER ARM FOrm: Ceramic Fork Rubber Pin: Good Surface State: Good Gate Valve: C/C 1 Angle V/V: OK C/C 2 Angle V/V: OK T/C Angle V/V (T1,T2): OK P/A: Maker: Yaskawa Ass'y Type : VOSH V0SH Visual: Good Wafer Sensor - Visual: Ok V/G(Baratron)_T/C - Maker/Model/Range: MKS/1torr/622A1TDE V/G(CV)_C/C,T/C - Granville Phillips/275203-KF16_3ea: OK Vacuum Switch_C/C - Maker/Model: Valcom / NDRN T/C Control Board: Slot 1 : TYB121-1/COM Slot 2 : TYB112-A/DIO - OK Slot 3 : TYB112-B/DIO - OK Slot 4 : OK Slot 5 : TYB111-C/MAIO - OK Slot 6 : TYB134-1/ILK - OK Robot Controller: RC/ELC1 - SRC-ll 013 PAC/ELC2 - SRC-ll 004 Ballast N2: PCV Unit - STEC/SV-1000OEM 代工型號說明
The Unity II is a platform introduced by TEL in 1995. It has gained a solid reputation for being one of the most reliable platforms available, with over 800 systems delivered to customers worldwide. In 1998, the Unity was recognized as the World Leader in Etch System Performance in the prestigious VLSI Customer Satisfaction Survey. The Unity II is a 2 chamber tool, focused on 200mm wafers, and various configurations are offered for wafer sizes from 150 to 300mm. It is a testament to its reliability and performance.文檔
類別
Dry / Plasma Etch
上次驗證: 2 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153984
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部
TEL / TOKYO ELECTRON
UNITY II
類別
Dry / Plasma Etch
上次驗證: 2 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153984
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available