描述
Size Configuration: 6”, 150mm Direct-Cooled Chamber 3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds MKS 627A Heated Baratron Dacscan P/N: 80-095-278, ISS 8 or Higher Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher RF Generator: ENI ACG-10 (Re-Calibrated)- 4- Unit 8100 MFC’s- 1- Unit 8130 Pressure Controller- 1- Integrated Flat panel配置
Gases in use: SF6, FR23, FR116, He, O2OEM 代工型號說明
未提供文檔
無文檔
TEGAL
903
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
58088
晶圓尺寸:
6"/150mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEGAL
903
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
58088
晶圓尺寸:
6"/150mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Size Configuration: 6”, 150mm Direct-Cooled Chamber 3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds MKS 627A Heated Baratron Dacscan P/N: 80-095-278, ISS 8 or Higher Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher RF Generator: ENI ACG-10 (Re-Calibrated)- 4- Unit 8100 MFC’s- 1- Unit 8130 Pressure Controller- 1- Integrated Flat panel配置
Gases in use: SF6, FR23, FR116, He, O2OEM 代工型號說明
未提供文檔
無文檔