
描述
ICP DRIE System, Includes: 1ea control cabinet w/ PDU, ENI RF generator, MKS Spectrum RF generator; 1ea SMC HRZ001-L-D recirculating chiller; 1ea Ebara SR20N vacuum pump; 1ea Ebara ESR20N-HT vacuum pump; 1ea Ebara vacuum pump配置
無配置OEM 代工型號說明
未提供文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 11 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
149257
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
STS
VPX PEGASUS
類別
Dry / Plasma Etch
上次驗證: 11 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
149257
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
ICP DRIE System, Includes: 1ea control cabinet w/ PDU, ENI RF generator, MKS Spectrum RF generator; 1ea SMC HRZ001-L-D recirculating chiller; 1ea Ebara SR20N vacuum pump; 1ea Ebara ESR20N-HT vacuum pump; 1ea Ebara vacuum pump配置
無配置OEM 代工型號說明
未提供文檔
無文檔