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描述
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361配置
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM 代工型號說明
未提供文檔
無文檔
STS
320 PC
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
28956
晶圓尺寸:
8"/200mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361配置
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM 代工型號說明
未提供文檔
無文檔