描述
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offline配置
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM 代工型號說明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116047
晶圓尺寸:
未知
年份:
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX MONARCH 25
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116047
晶圓尺寸:
未知
年份:
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offline配置
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM 代工型號說明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production文檔
無文檔