描述
無描述配置
Omega c2L Platform Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM 代工型號說明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production文檔
無文檔
KLA / SPTS
PRIMAXX MONARCH 25
已驗證
類別
Dry / Plasma Etch
上次驗證: 15 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116047
晶圓尺寸:
未知
年份:
2019
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX MONARCH 25
類別
Dry / Plasma Etch
上次驗證: 15 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116047
晶圓尺寸:
未知
年份:
2019
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Omega c2L Platform Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM 代工型號說明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production文檔
無文檔