描述
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.配置
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM 代工型號說明
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 5 天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
146034
晶圓尺寸:
未知
年份:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
OMEGA SYNAPSE
類別
Dry / Plasma Etch
上次驗證: 5 天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
146034
晶圓尺寸:
未知
年份:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.配置
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM 代工型號說明
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文檔
無文檔