
描述
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.配置
Vacuum Pump and Chiller IncludedOEM 代工型號說明
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Crated
產品編號:
123899
晶圓尺寸:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
年份:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
XACTIX CVE
類別
Dry / Plasma Etch
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Crated
產品編號:
123899
晶圓尺寸:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
年份:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.配置
Vacuum Pump and Chiller IncludedOEM 代工型號說明
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.文檔
無文檔