描述
無描述配置
ICP chamber for Omega fxP Etch system w/o MFOEM 代工型號說明
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 11 天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
146865
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / SPTS
OMEGA fxP
類別
Dry / Plasma Etch
上次驗證: 11 天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
146865
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
ICP chamber for Omega fxP Etch system w/o MFOEM 代工型號說明
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文檔
無文檔