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描述
Main body. SMIF Loader Controller CRT Keyboard Through the wall SUS Front panel Al Side panel: Ni Coated Pump interface配置
Gas system: (5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3 Quartz tube protection C mictube ESC Uni1.ersal chuck, 8" Water auxiliariesOEM 代工型號說明
未提供文檔
無文檔
SHIBAURA
CDE 80
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
29599
晶圓尺寸:
8"/200mm
年份:
未知
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描述
Main body. SMIF Loader Controller CRT Keyboard Through the wall SUS Front panel Al Side panel: Ni Coated Pump interface配置
Gas system: (5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3 Quartz tube protection C mictube ESC Uni1.ersal chuck, 8" Water auxiliariesOEM 代工型號說明
未提供文檔
無文檔