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PLASMATHERM VERSALINE ETCH

描述

ICP Etch - 3 Chamber - All same process

配置

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM 代工型號說明

未提供

文檔

文件圖示

Plasmatherm Versaline ICP.pdf

PLASMATHERM

VERSALINE ETCH

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已驗證

類別

Dry / Plasma Etch

上次驗證: 11 天前

關鍵商品詳情

條件:

Used

作業狀態:

未知

產品編號:

138075

晶圓尺寸:

6"/150mm

年份:

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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PLASMATHERM VERSALINE ETCH

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PLASMATHERM

VERSALINE ETCH

verified-listing-icon

已驗證

類別

Dry / Plasma Etch

上次驗證: 11 天前

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關鍵商品詳情

條件:

Used

作業狀態:

未知

產品編號:

138075

晶圓尺寸:

6"/150mm

年份:

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

描述

ICP Etch - 3 Chamber - All same process

配置

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM 代工型號說明

未提供

文檔

文件圖示

Plasmatherm Versaline ICP.pdf

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