描述
無描述配置
The tool is missing the turbo & controller, but rebuilt spares can be included with tool Gases: CL2, BCL3, CF4, C2F6, Ar, O2 6” but possible to run 8” (no load-lock)OEM 代工型號說明
Plasma etch文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
140328
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
SLR 740
類別
Dry / Plasma Etch
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
140328
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
The tool is missing the turbo & controller, but rebuilt spares can be included with tool Gases: CL2, BCL3, CF4, C2F6, Ar, O2 6” but possible to run 8” (no load-lock)OEM 代工型號說明
Plasma etch文檔
無文檔