描述
無描述配置
ICP system complete with: -robotic wafer transfer system -computer controls -thermal transfer module for substrate clamping -closed loop pressure control -RF high freq. inductive coupled plasma source for high density plasma creation -Installed pumps and MFC control unitsOEM 代工型號說明
未提供文檔
無文檔
PLASMATHERM
SLR 770
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
14081
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
SLR 770
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
14081
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
ICP system complete with: -robotic wafer transfer system -computer controls -thermal transfer module for substrate clamping -closed loop pressure control -RF high freq. inductive coupled plasma source for high density plasma creation -Installed pumps and MFC control unitsOEM 代工型號說明
未提供文檔
無文檔