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PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
描述
Operational as-is
配置
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2
OEM 代工型號說明
未提供
文檔

無文檔

類別
Dry / Plasma Etch

上次驗證: 超過60天前

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

36140


晶圓尺寸:

4"/100mm, 8"/200mm


年份:

1995


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

PLASMATHERM

SLR 720

verified-listing-icon
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/7e48b8f6db984d4fa09733ae2eee94ef_206f47761a45489c8c640c0e3afa0b99_mw.png
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/ff0bb2cad2fd4d5f8e70f655fad8cda0_cfa9bd00c17f47e498e589f10565916e45005c_mw.jpeg
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/377c72a088e842cc823644147528bef1_9b1072b0889c4b498db5d02683395b5f_mw.png
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/bdb397309e264e7db2e96d440e319caf_310e65d8bab84d618c0f6e2edfce3bdb_mw.png
關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

36140


晶圓尺寸:

4"/100mm, 8"/200mm


年份:

1995


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Operational as-is
配置
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2
OEM 代工型號說明
未提供
文檔

無文檔