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描述
Operational as-is配置
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEM 代工型號說明
未提供文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
36140
晶圓尺寸:
4"/100mm, 8"/200mm
年份:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM
SLR 720
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
36140
晶圓尺寸:
4"/100mm, 8"/200mm
年份:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Operational as-is配置
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEM 代工型號說明
未提供文檔
無文檔