描述
Neither matching unit is in working condition The backing pump has failed There is an internal leak in the system, which is believed to be related to the slit valve配置
ICP/RIE Configured to run SF6, Hydrogen and Methane (ITO etch) Frequency: 50/60 hz Voltage: 208 VAC 3 Phase Full Load AMP: 40 AMP'sOEM 代工型號說明
Etching System文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Idle
產品編號:
109932
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
100 180 ICP
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Idle
產品編號:
109932
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Neither matching unit is in working condition The backing pump has failed There is an internal leak in the system, which is believed to be related to the slit valve配置
ICP/RIE Configured to run SF6, Hydrogen and Methane (ITO etch) Frequency: 50/60 hz Voltage: 208 VAC 3 Phase Full Load AMP: 40 AMP'sOEM 代工型號說明
Etching System文檔
無文檔