描述
Polysilicon Etch配置
無配置OEM 代工型號說明
Lam’s TCP 9400DFM is an advanced silicon etch system for 200mm wafers, designed to meet gate and STI etch requirements down to the 130nm technology node. It is capable of running multiple applications in situ, increasing process flexibility, reliability, and productivity. The system features SymFlo™, a symmetrical flow gas distribution system, and Voltage Control Interface™ (VCI™), a closed-loop system that enhances chamber matching capabilities. It also incorporates Lam’s unique Waferless Auto Clean™ (WAC™) technology, which offers world-class mean time between cleans (MTBC). An optional interferometric endpoint system provides repeatable endpoint capability. The TCP 9400DFM offers upgrade capability for Lam’s highly successful TCP 9400PTX.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
122873
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
TCP 9400DFM
類別
Dry / Plasma Etch
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
122873
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Polysilicon Etch配置
無配置OEM 代工型號說明
Lam’s TCP 9400DFM is an advanced silicon etch system for 200mm wafers, designed to meet gate and STI etch requirements down to the 130nm technology node. It is capable of running multiple applications in situ, increasing process flexibility, reliability, and productivity. The system features SymFlo™, a symmetrical flow gas distribution system, and Voltage Control Interface™ (VCI™), a closed-loop system that enhances chamber matching capabilities. It also incorporates Lam’s unique Waferless Auto Clean™ (WAC™) technology, which offers world-class mean time between cleans (MTBC). An optional interferometric endpoint system provides repeatable endpoint capability. The TCP 9400DFM offers upgrade capability for Lam’s highly successful TCP 9400PTX.文檔
無文檔