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LAM RESEARCH CORPORATION RAINBOW 4720XL
    描述
    無描述
    配置
    Type of Loadlock: LAM Number of Process Chamber: 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot BROOKS MAG7 1409CHE11272 User Interface FRONT UI Computer YES TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm YES Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control YES Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board YES Configuration of Process Module PM1 PM2 PM4 Remark Model of Chamber 4720XL 4720XL 4720XL Year of Construction 2014 2014 2014 Process Gauge MKS MKS MKS 625D-30518 Chamber Gauge MKS MKS MKS 625D-30518 Foreline Guage MKS MKS MKS 625D11TGEEV Pendulum valve YES YES YES Model of TMP STP-H301C STP-H301C STP-H301C Model of TMP Controller SCU-800 SCU-800 SCU-800 Model of TCP Generator(TOP) AE AE AE Model of Bias Generator(BOT) 1250 1250 1250 TCP Matcher YES YES YES Bias Matcher YES YES YES ESC/ chuck YES YES YES ESC Power Supply YES YES YES Backside Helium UPC YES YES YES VME Assembly YES YES YES Foreline Assembly YES YES YES OES YES YES YES Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPS
    OEM 代工型號說明
    Etchers & Ashers
    文檔

    無文檔

    LAM RESEARCH CORPORATION

    RAINBOW 4720XL

    verified-listing-icon

    已驗證

    類別
    Dry / Plasma Etch

    上次驗證: 6 天前

    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    145018

    晶圓尺寸:

    8"/200mm

    年份:

    未知

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4720XL

    LAM RESEARCH CORPORATION

    RAINBOW 4720XL

    Dry / Plasma Etch
    年份: 0條件: 二手
    上次驗證6 天前

    LAM RESEARCH CORPORATION

    RAINBOW 4720XL

    verified-listing-icon
    已驗證
    類別
    Dry / Plasma Etch
    上次驗證: 6 天前
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    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    145018

    晶圓尺寸:

    8"/200mm

    年份:

    未知

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    無描述
    配置
    Type of Loadlock: LAM Number of Process Chamber: 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot BROOKS MAG7 1409CHE11272 User Interface FRONT UI Computer YES TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm YES Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control YES Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board YES Configuration of Process Module PM1 PM2 PM4 Remark Model of Chamber 4720XL 4720XL 4720XL Year of Construction 2014 2014 2014 Process Gauge MKS MKS MKS 625D-30518 Chamber Gauge MKS MKS MKS 625D-30518 Foreline Guage MKS MKS MKS 625D11TGEEV Pendulum valve YES YES YES Model of TMP STP-H301C STP-H301C STP-H301C Model of TMP Controller SCU-800 SCU-800 SCU-800 Model of TCP Generator(TOP) AE AE AE Model of Bias Generator(BOT) 1250 1250 1250 TCP Matcher YES YES YES Bias Matcher YES YES YES ESC/ chuck YES YES YES ESC Power Supply YES YES YES Backside Helium UPC YES YES YES VME Assembly YES YES YES Foreline Assembly YES YES YES OES YES YES YES Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPS
    OEM 代工型號說明
    Etchers & Ashers
    文檔

    無文檔

    類似上架商品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4720XL

    LAM RESEARCH CORPORATION

    RAINBOW 4720XL

    Dry / Plasma Etch年份: 0條件: 二手上次驗證:6 天前