跳到主要內容
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
LAM RESEARCH CORPORATION RAINBOW 4520i
    描述
    無描述
    配置
    LAM Isotropic chamber #1 (ONLY)
    OEM 代工型號說明
    The Rainbow® 4520i system is a single wafer, vacuum load-locked low pressure oxide system with two active processing chambers. It is designed for integrated isotropic/anisotropic profile on high aspect ratio contact and via structures. The Isotropic Module adds isotropic oxide etching capabilities to the existing anisotropic capabilities of the Rainbow 4520, providing excellent aluminum step coverage. The Isotropic Module is incorporated onto the entrance load-lock on the Rainbow 4520, requiring only one additional wafer handling step. Having two chambers on a single machine greatly reduces the possibility of cross contamination between processes, which minimizes wafer breakage and defect densities. The system has a high uptime of ≥ 85% and is capable of isotropic etching for dielectric (oxide) films. The Rainbow® 4520i system has several applications, including contact etch, planarization, via etch, trench mask etch, and pad etch.
    文檔

    無文檔

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    verified-listing-icon

    已驗證

    類別
    Dry / Plasma Etch

    上次驗證: 超過60天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    82462


    晶圓尺寸:

    未知


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch
    年份: 0條件: 二手
    上次驗證超過60天前

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    verified-listing-icon
    已驗證
    類別
    Dry / Plasma Etch
    上次驗證: 超過60天前
    listing-photo-426356db4e574a5da1d65b62a57efdcf-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2056/426356db4e574a5da1d65b62a57efdcf/97ea964527124a90a0315f1860625f62_6dfa47e8647c40aeaa05b8c8c70c3fb41201a_mw.jpeg
    listing-photo-426356db4e574a5da1d65b62a57efdcf-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2056/426356db4e574a5da1d65b62a57efdcf/7477ecfa40a741c1bfd0fb1878fd05c6_c660076921f34795bf041ff49a7b2e8a1201a_mw.jpeg
    listing-photo-426356db4e574a5da1d65b62a57efdcf-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2056/426356db4e574a5da1d65b62a57efdcf/6ff21871cc33440a9e82fbdcd5d70974_5648005973a54a11906bc61e10e433cb_mw.jpeg
    listing-photo-426356db4e574a5da1d65b62a57efdcf-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2056/426356db4e574a5da1d65b62a57efdcf/99d92a4054aa449db35a7ef8a3f172f2_a756ae1b49ae43e89210bb494b6ec257_mw.jpeg
    listing-photo-426356db4e574a5da1d65b62a57efdcf-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2056/426356db4e574a5da1d65b62a57efdcf/e9a303522dca4d48996e789892d3c356_cdfd41e7d1b449c4952593083505bd9f_mw.jpeg
    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    82462


    晶圓尺寸:

    未知


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    無描述
    配置
    LAM Isotropic chamber #1 (ONLY)
    OEM 代工型號說明
    The Rainbow® 4520i system is a single wafer, vacuum load-locked low pressure oxide system with two active processing chambers. It is designed for integrated isotropic/anisotropic profile on high aspect ratio contact and via structures. The Isotropic Module adds isotropic oxide etching capabilities to the existing anisotropic capabilities of the Rainbow 4520, providing excellent aluminum step coverage. The Isotropic Module is incorporated onto the entrance load-lock on the Rainbow 4520, requiring only one additional wafer handling step. Having two chambers on a single machine greatly reduces the possibility of cross contamination between processes, which minimizes wafer breakage and defect densities. The system has a high uptime of ≥ 85% and is capable of isotropic etching for dielectric (oxide) films. The Rainbow® 4520i system has several applications, including contact etch, planarization, via etch, trench mask etch, and pad etch.
    文檔

    無文檔

    類似上架商品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch年份: 0條件: 二手上次驗證:超過60天前
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch年份: 0條件: 二手上次驗證:超過60天前
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch年份: 0條件: 二手上次驗證:超過60天前