We value your privacy
We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. 閱讀詳情
描述
Tool condition: Retrofit ok配置
Layout configuration: Specific Layout definition : Standard -- Mainframe Configuration: Platform : Alliance A6 / 2 loadlocks PM1 : 9400DFM PM2 : 9400DFM PM3 : 9400DFM PM4 : 9400DFM Load Lock type : Auto Door Cassette Type : 25 slot cassette -- Chamber Configuration: Chamber type : 9400DFM ESC : Anodized ESC - Snake type: P/N 718-043893-801 RF Generator : 13.56 MHz RF generators Top :660-024637-026 Bias: 660-024637-028 Alternative: AE Paramount RF generators (Top + Bias) RF Match : Top: 853-032294-002 Bias: 853-250001-024 Endpoint Detector : Spectrometer (LamResearch OES or Verity SD1024D) ESC power supply : P/N: 853-025054-018 or 853-025054-118 Pressure Regulation : VAT 65 pendulum valve RF peak probe (VCI) : ASSY,HSG,CAP DIV/PEAK DET P/N: 853-370871-002 Turbo Pump : 1600l/s - Alcatel ATH1600 -- Gas Pannel configuration: Gas box type : A6 GAS SYSTEM - 12 gases Line 1 : Brooks GF100 MFC / Cl2 - 200 sccm Line 2 : Brooks GP200 MFC / HBr - 500 sccm Line 3 : Brooks GF100 MFC / SF6 - 200 sccm Line 4 : Brooks GF100 MFC / CH2F2 - 100 sccm Line 5 : Brooks GF100 MFC /He O2 (80% He 20% O2) - 500 sccm Line 6 : Brooks GP200 MFC / O2 - 60 sccm Line 7 : Brooks GF100 MFC / CF4 - 200 sccm Line 8 : Brooks GF100 MFC / He - 500 sccm Line 9 : NO GAS Line 10 : Brooks GF100 MFC / O2 500 sccm Line 11 : NO GAS Line 12 : NO GAS PM to Gas Box Intercon Cable PM to Gas Box : 50 ftOEM 代工型號說明
未提供文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過30天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
103535
晶圓尺寸:
8"/200mm
年份:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部
LAM RESEARCH CORPORATION
ALLIANCE 6 (A6)
類別
Dry / Plasma Etch
上次驗證: 超過30天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
103535
晶圓尺寸:
8"/200mm
年份:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Tool condition: Retrofit ok配置
Layout configuration: Specific Layout definition : Standard -- Mainframe Configuration: Platform : Alliance A6 / 2 loadlocks PM1 : 9400DFM PM2 : 9400DFM PM3 : 9400DFM PM4 : 9400DFM Load Lock type : Auto Door Cassette Type : 25 slot cassette -- Chamber Configuration: Chamber type : 9400DFM ESC : Anodized ESC - Snake type: P/N 718-043893-801 RF Generator : 13.56 MHz RF generators Top :660-024637-026 Bias: 660-024637-028 Alternative: AE Paramount RF generators (Top + Bias) RF Match : Top: 853-032294-002 Bias: 853-250001-024 Endpoint Detector : Spectrometer (LamResearch OES or Verity SD1024D) ESC power supply : P/N: 853-025054-018 or 853-025054-118 Pressure Regulation : VAT 65 pendulum valve RF peak probe (VCI) : ASSY,HSG,CAP DIV/PEAK DET P/N: 853-370871-002 Turbo Pump : 1600l/s - Alcatel ATH1600 -- Gas Pannel configuration: Gas box type : A6 GAS SYSTEM - 12 gases Line 1 : Brooks GF100 MFC / Cl2 - 200 sccm Line 2 : Brooks GP200 MFC / HBr - 500 sccm Line 3 : Brooks GF100 MFC / SF6 - 200 sccm Line 4 : Brooks GF100 MFC / CH2F2 - 100 sccm Line 5 : Brooks GF100 MFC /He O2 (80% He 20% O2) - 500 sccm Line 6 : Brooks GP200 MFC / O2 - 60 sccm Line 7 : Brooks GF100 MFC / CF4 - 200 sccm Line 8 : Brooks GF100 MFC / He - 500 sccm Line 9 : NO GAS Line 10 : Brooks GF100 MFC / O2 500 sccm Line 11 : NO GAS Line 12 : NO GAS PM to Gas Box Intercon Cable PM to Gas Box : 50 ftOEM 代工型號說明
未提供文檔
無文檔