描述
Plasma Etch配置
Install Type: Thru-the-wall (TTW) Status Lamp System software (App): Envision ver1.5.1 SECS I Interface Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC) Endpoint Detection: Monochromator 405nm / 520nm Turbo: Seiko Seiki STP H200C RF Match Type: LAM On-board RF Generators: No RF Generator: ENI OEM-650A RF Hours: 402056 Remote RF Cart: No ATM Passivation Module: No Plasma LLK (PLL): No High Conductance Manifold: No Gas Box: Remote gas Box: No Orbitally welded GB: Yes Backside cooling MFC: Unit 1250A Gases: #1: N2, 200 sccm, Unit 1200A #2: CHF3, 50 sccm, Unit 1200A #3: N2, 300 sccm, Aera #4: N2, 500 sccm, Unit UFC 1660 #5: CF4, 150 sccm, Unit 1200A #6: SF6, 150 sccm, Unit 1200A #7: He, 1 slm, Unit UFC 1660 #8: O2, 200 sccm, Unit UFC 1660 Pump: Heated pumping manifolds: No Pump controller: iQ Series Entrance / Exit: Edwards iQDP-40 Main: Edwards iQDP-80 Chiller(s): (2) SMC HRS018-WN-20-M On-board AC Distribution type: Fused Power requirements: 208VAC, 3-Phase, 5-WireOEM 代工型號說明
The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. Unique RF match networks are located at the upper and lower electrodes for programmable switching between plasma and RIE modes. Designed for continuous operation, the LRC Rainbow etchers are computer-controlled, allowing either manual or automatic control. The Lam Rainbow 44XX Series can be for Tungsten silicide, Silicon nitride, polysilicon ,oxide, Crystallise Si etc.文檔
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LAM RESEARCH CORPORATION
RAINBOW 4420
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
63314
晶圓尺寸:
8"/200mm
年份:
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
RAINBOW 4420
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
63314
晶圓尺寸:
8"/200mm
年份:
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Plasma Etch配置
Install Type: Thru-the-wall (TTW) Status Lamp System software (App): Envision ver1.5.1 SECS I Interface Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC) Endpoint Detection: Monochromator 405nm / 520nm Turbo: Seiko Seiki STP H200C RF Match Type: LAM On-board RF Generators: No RF Generator: ENI OEM-650A RF Hours: 402056 Remote RF Cart: No ATM Passivation Module: No Plasma LLK (PLL): No High Conductance Manifold: No Gas Box: Remote gas Box: No Orbitally welded GB: Yes Backside cooling MFC: Unit 1250A Gases: #1: N2, 200 sccm, Unit 1200A #2: CHF3, 50 sccm, Unit 1200A #3: N2, 300 sccm, Aera #4: N2, 500 sccm, Unit UFC 1660 #5: CF4, 150 sccm, Unit 1200A #6: SF6, 150 sccm, Unit 1200A #7: He, 1 slm, Unit UFC 1660 #8: O2, 200 sccm, Unit UFC 1660 Pump: Heated pumping manifolds: No Pump controller: iQ Series Entrance / Exit: Edwards iQDP-40 Main: Edwards iQDP-80 Chiller(s): (2) SMC HRS018-WN-20-M On-board AC Distribution type: Fused Power requirements: 208VAC, 3-Phase, 5-WireOEM 代工型號說明
The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. Unique RF match networks are located at the upper and lower electrodes for programmable switching between plasma and RIE modes. Designed for continuous operation, the LRC Rainbow etchers are computer-controlled, allowing either manual or automatic control. The Lam Rainbow 44XX Series can be for Tungsten silicide, Silicon nitride, polysilicon ,oxide, Crystallise Si etc.文檔
無文檔