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描述
Complete system配置
•Polysilicon: 490 •Wafer size: 6 inch •Upgraded TFT monitors •Incl maintenance console •Conditon: AS IS (No Chiller, No pump but with ENI RF Generator) Features: •Single-wafer processing •Fully automated microprocessor control •Cassette-to-cassette wafer processing •Vacuum load locked •Programmable, variable electrode spacing •Endpoint detection •Configurable for 3-inch to 6-inch wafers •Stand-alone or bulk-head mount configurationOEM 代工型號說明
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65313
晶圓尺寸:
6"/150mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
AUTOETCH 490
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65313
晶圓尺寸:
6"/150mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Complete system配置
•Polysilicon: 490 •Wafer size: 6 inch •Upgraded TFT monitors •Incl maintenance console •Conditon: AS IS (No Chiller, No pump but with ENI RF Generator) Features: •Single-wafer processing •Fully automated microprocessor control •Cassette-to-cassette wafer processing •Vacuum load locked •Programmable, variable electrode spacing •Endpoint detection •Configurable for 3-inch to 6-inch wafers •Stand-alone or bulk-head mount configurationOEM 代工型號說明
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.文檔
無文檔