描述
ETCH配置
2300 e4 with 3 Load Port and 4 Kiyo FT chambers Software: 1.8.4-SP9-CE006c-Patch-02-CF-Etch_2018-12-07-141128 • 4 Kiyo FT chambers • 3 Wafer Load port module (TDK) • Transfer Chamber • ATM robot with one end effector (Brooks) • VTM robot with dual end effectors (Brooks Mag7) • 2 wafer slot Airlock Vacuum system • N2/Purge Vent • TM control software • Communication Protocol (RS232, LON)OEM 代工型號說明
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LAM RESEARCH CORPORATION
2300
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
101693
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
2300
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
101693
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
ETCH配置
2300 e4 with 3 Load Port and 4 Kiyo FT chambers Software: 1.8.4-SP9-CE006c-Patch-02-CF-Etch_2018-12-07-141128 • 4 Kiyo FT chambers • 3 Wafer Load port module (TDK) • Transfer Chamber • ATM robot with one end effector (Brooks) • VTM robot with dual end effectors (Brooks Mag7) • 2 wafer slot Airlock Vacuum system • N2/Purge Vent • TM control software • Communication Protocol (RS232, LON)OEM 代工型號說明
未提供文檔
無文檔