描述
1. Software abnormal Pending processing ( The machine screen is unresponsive. A bunch of alarm) 2. EC magnetron generator 3. AC magnetron generator 4. EC TMP and TMP controller 5. BR dry pump 6. AC dry pump 7. LC UC Motor 8. chiller 9.EC Dry pump A30W 10.PM parts lackEC WAFER CLAMP 11.PM parts lack EC ELECTRODE COVER 12.PM parts lack EC GROUND ELECTRODE配置
無配置OEM 代工型號說明
未提供文檔
無文檔
HITACHI
M-308ATE
類別
Dry / Plasma Etch
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
142660
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
1. Software abnormal Pending processing ( The machine screen is unresponsive. A bunch of alarm) 2. EC magnetron generator 3. AC magnetron generator 4. EC TMP and TMP controller 5. BR dry pump 6. AC dry pump 7. LC UC Motor 8. chiller 9.EC Dry pump A30W 10.PM parts lackEC WAFER CLAMP 11.PM parts lack EC ELECTRODE COVER 12.PM parts lack EC GROUND ELECTRODE配置
無配置OEM 代工型號說明
未提供文檔
無文檔