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描述
無描述配置
Brooks ATR8 load port *2 Brooks ATR8 robot *1 Brooks Magan7 robot *1 SMC chiller *1 IH600 ритр *2 1H80 pump*1 VAT valve*4 RF generator *2 Metch.box controller*2 Metch.box *2 wafer sensor *2 lift pin driver *2 lift pin motor *2 SMC solinoed valve assit *1 chamber door bellows * 4 Load lock door valve *2 pressure detector *2 Monitor*1 FE area lonizer bar(power supply)*2OEM 代工型號說明
High Performance Dry Ashing System文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
82275
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
FOI
RYDEEN-10000
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
82275
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Brooks ATR8 load port *2 Brooks ATR8 robot *1 Brooks Magan7 robot *1 SMC chiller *1 IH600 ритр *2 1H80 pump*1 VAT valve*4 RF generator *2 Metch.box controller*2 Metch.box *2 wafer sensor *2 lift pin driver *2 lift pin motor *2 SMC solinoed valve assit *1 chamber door bellows * 4 Load lock door valve *2 pressure detector *2 Monitor*1 FE area lonizer bar(power supply)*2OEM 代工型號說明
High Performance Dry Ashing System文檔
無文檔