描述

Details Attached

配置

Chamber A: SYM3 Process - POLY Chamber A1 / A2: DTCU Turbo - TMP-4304LMTC / TMP-4304LMTC Turbo Controller - SHIMADZU EI-RO4MT / EI-RO4MT Gate VV Gate VV Controller - VAT: Missing / 0190-42982 Source Generator - Paramount 3013 0190-53528 / 0190-53528 BIAS Generator - Paramount 15130190-53527 / 0190-53527 RF Generator - AE paramount MF50020190-53530 / 0190-53530 Source Match - AE : 3155314-004 / 3155314-004 Bias Match - AE : 3155332-004 / 3155332-004 High Voltage Power Supply - Spellman - 0190-39547 / 0190-39547 Interface Module Mesa C3 CIOC EPD Type - EyeD / EyeD RF Filter Motion Controller - 0010-65925 / Missing Manometer - 1.0 & 0.1 Torr / 1.0 & 0.1Torr Chamber B: SYM3 Process - POLY Chamber B1 / B2: DTCU Turbo - TMP-4304LMTC / TMP-4304LMTC Turbo Controller - Missing / Missing Gate VV Gate VV Controller - Missing / Missing Source Generator - Missing / Missing Bias Generator - Missing / Missing RF Generator - Missing / Missing Source Match - Missing Bias Match - Missing High Voltage Power Supply: Spellman - Missing Interface Module Mesa C3 CIOC EPD Type - EyeD / Missing RF Filter - Missing Motion Controller - 0010-65925 / Missing Manometer - 1.0 & 0.1 Torr / 1.0 & 0.1Torr Chamber C: SYM 3 Process - POLY Chamber C1 / Empty: DTCU Turbo - TMP-5305LMTF Gate VV Controller - Missing Source Generator - Missing Bias Generator - Missing RF Generator - Missing Source Match - Missing Bias Match - Missing High Voltage Power Supply: Spellman - Missing Interface Module Mesa C3 CIOC EPD Type - A1: EyeD Missing RF Filter - Missing Motion Controller - Missing Manometer - 1.0 & 0.1 Torr Load Ports: (QTY 3) Interface Model: FI 5.4 FES Server HRTS2 Server TCS Server WHS Server HRTS Server FI Robot Type: Kawasaki 3TTS20B-A004 Buffer Robot Type: PERSIMMON 001-041071-01R Buffer Robot Controller: 0190-47038300424 TTS20+AL Buffer Robot Controller: Missing Pre Aligner