APPLIED MATERIALS (AMAT) CENTURA AP ADVANTEDGE G5

描述

Metal Etch(3 chamber+1strip)

配置

無配置

OEM 代工型號說明

The Centura AP AdvantEdge G5 is a metal etch system by Applied Materials (AMAT) that is designed for 150mm and 200mm wafer sizes and addresses technology challenges that include high aspect ratio etch for a range of applications. It can be used for etching silicon, metal, and dielectric materials. It can also be used for polysilicon etch.