The ASM AD400 is a diffusion and oxidation furnaces system used in semiconductor manufacturing. It is designed for processing 8-inch wafers with dual tubes or 6-inch wafers with dual boats. The system's body is anodized to resist corrosion, ensuring durability and reliability during wafer processing. 

ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.



A400

ASM A400 with one standard Power Poly reactor and one Dope Power Poly reactor.

A400

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