描述
Al PVD配置
TMP(turbo Pump) MFC(flow control) RF ESC/HEATER Chamber 1 LAM Chamber/Q300 Ti/TiN Chamber 2 LAM Chamber/HCM Ti Chamber 3 LAM Chamber/Q300 Al Chamber 5 LAM Chamber/Q300 Al Chamber 6 LAM Chamber/HCM Ti Chamber 7 LAM Chamber/Q300 Ti/TiNOEM 代工型號說明
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).文檔
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LAM RESEARCH / NOVELLUS
INOVA xT
已驗證
類別
Deposition
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
95975
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部LAM RESEARCH / NOVELLUS
INOVA xT
已驗證
類別
Deposition
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
95975
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Al PVD配置
TMP(turbo Pump) MFC(flow control) RF ESC/HEATER Chamber 1 LAM Chamber/Q300 Ti/TiN Chamber 2 LAM Chamber/HCM Ti Chamber 3 LAM Chamber/Q300 Al Chamber 5 LAM Chamber/Q300 Al Chamber 6 LAM Chamber/HCM Ti Chamber 7 LAM Chamber/Q300 Ti/TiNOEM 代工型號說明
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).文檔
無文檔