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LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
  • LAM RESEARCH / NOVELLUS ALTUS DirectFill MAX
描述
CVD
配置
W
OEM 代工型號說明
ALTUS DirectFill is a tungsten nitride/tungsten deposition system designed for advanced contact and via-fill applications at 65 nm and below. It simplifies the tungsten deposition process by replacing the standard multi-tool Ti/TiN/W approach with a single three-module system. The advanced plug-fill technology of ALTUS DirectFill can reduce contact resistance and lower the overall cost of ownership by 50% or more when compared to existing processes. This makes it a cost-effective and efficient solution for advanced contact and via-fill applications.
文檔

無文檔

類別
CVD

上次驗證: 超過60天前

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

76014


晶圓尺寸:

12"/300mm


年份:

2009


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

LAM RESEARCH / NOVELLUS

ALTUS DirectFill MAX

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已驗證
類別
CVD
上次驗證: 超過60天前
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關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

76014


晶圓尺寸:

12"/300mm


年份:

2009


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
CVD
配置
W
OEM 代工型號說明
ALTUS DirectFill is a tungsten nitride/tungsten deposition system designed for advanced contact and via-fill applications at 65 nm and below. It simplifies the tungsten deposition process by replacing the standard multi-tool Ti/TiN/W approach with a single three-module system. The advanced plug-fill technology of ALTUS DirectFill can reduce contact resistance and lower the overall cost of ownership by 50% or more when compared to existing processes. This makes it a cost-effective and efficient solution for advanced contact and via-fill applications.
文檔

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