描述
Mobile Charge Function Slab for calibration配置
DP + SPV + SILC working condition 200MM waferOEM 代工型號說明
The SEMILAB FAAST 230 is a non-contact, fast in-line monitoring system designed to detect heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, in a medium to high-volume manufacturing environment. It features automated wafer handling, with options for SMIF/FOUP Loadport/Versaport, and can perform full wafer FAST mapping of diffusion length, Iron, and other recombination centers. The system is configurable for 100 mm to 300 mm wafers and is compatible with other Semilab SDI FAaST tool measurement technologies. Additional options include a minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, and more.文檔
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SEMILAB
FAAST 230
類別
Defect Inspection
上次驗證: 超過30天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
Deinstalled
產品編號:
66386
晶圓尺寸:
8"/200mm
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Mobile Charge Function Slab for calibration配置
DP + SPV + SILC working condition 200MM waferOEM 代工型號說明
The SEMILAB FAAST 230 is a non-contact, fast in-line monitoring system designed to detect heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, in a medium to high-volume manufacturing environment. It features automated wafer handling, with options for SMIF/FOUP Loadport/Versaport, and can perform full wafer FAST mapping of diffusion length, Iron, and other recombination centers. The system is configurable for 100 mm to 300 mm wafers and is compatible with other Semilab SDI FAaST tool measurement technologies. Additional options include a minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, and more.文檔
無文檔