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描述
There are two loading ports. One is for 300mm FOUP & FOSB and another is for 200mm FOUP and Open cassette配置
無配置OEM 代工型號說明
The eDR7280 is an electronbeam wafer defect review and classification system that utilizes improved imaging and automatic defect classification capability to identify detected defects and produce an accurate representation of the detected defect population.文檔
KLA
eDR-7280
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
111650
晶圓尺寸:
未知
年份:
2016
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