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描述
HDD included New laser Unpatterned Wafer Surface Inspection System配置
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEM 代工型號說明
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.文檔
無文檔
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
108659
晶圓尺寸:
未知
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN SP2
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
108659
晶圓尺寸:
未知
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
HDD included New laser Unpatterned Wafer Surface Inspection System配置
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEM 代工型號說明
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.文檔
無文檔