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描述
KLA-Tencor AIT-XP+ ( Upgraded from AIT XP ) *. Fully refurbished. *. Installed in Clean-room. *. Can demonstrate any time.配置
Working . CE marked . Single open cs sette handler . Image Computer . OS : Microsoft Windows NT 4.0 . Application S/W : Version 6.3.24.3 ( Build Time 2006.8 ) . Laser: 75mW 488nm argon ion laser . (3) Collection Channels . Spot Size 7um, 5um, 3.5um . Internal Microscope Review - Microscope review Objectives 10x, 50x, 100x, 150x - Bright / Dark Field View - AutoFocus Capability . Brooks Robot and pre aligner . Blower Unit . KLARF Output File Facility Requirements: - CDA : 1/4" , min 90psi - Vacuum : 1/4" 20-in Hg - Power . (Main): 208VAC, 3-Phase, 4-Wire, Freq 50/60Hz . (Image computer): 208VAC, 3-Phase, -4 Wire, Freq 50/60HzOEM 代工型號說明
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KLA
AIT XP+
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65990
晶圓尺寸:
8"/200mm
年份:
2000
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Refurbishment Services
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描述
KLA-Tencor AIT-XP+ ( Upgraded from AIT XP ) *. Fully refurbished. *. Installed in Clean-room. *. Can demonstrate any time.配置
Working . CE marked . Single open cs sette handler . Image Computer . OS : Microsoft Windows NT 4.0 . Application S/W : Version 6.3.24.3 ( Build Time 2006.8 ) . Laser: 75mW 488nm argon ion laser . (3) Collection Channels . Spot Size 7um, 5um, 3.5um . Internal Microscope Review - Microscope review Objectives 10x, 50x, 100x, 150x - Bright / Dark Field View - AutoFocus Capability . Brooks Robot and pre aligner . Blower Unit . KLARF Output File Facility Requirements: - CDA : 1/4" , min 90psi - Vacuum : 1/4" 20-in Hg - Power . (Main): 208VAC, 3-Phase, 4-Wire, Freq 50/60Hz . (Image computer): 208VAC, 3-Phase, -4 Wire, Freq 50/60HzOEM 代工型號說明
未提供文檔
無文檔