描述
Metrology / inspection system配置
Known issues: Not included: Laser Power Supply; (Qty 5) Optic Parts; Laser Inspection Unit Robot Handler FOUP Factory Interface Process: Darkfield Inspection Software Version: 6.3.24 CIM: SECS/GEMOEM 代工型號說明
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.文檔
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KLA
AIT UV
類別
Defect Inspection
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154796
晶圓尺寸:
12"/300mm
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Metrology / inspection system配置
Known issues: Not included: Laser Power Supply; (Qty 5) Optic Parts; Laser Inspection Unit Robot Handler FOUP Factory Interface Process: Darkfield Inspection Software Version: 6.3.24 CIM: SECS/GEMOEM 代工型號說明
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.文檔
無文檔