描述
KLA SP1 (USA)配置
無配置OEM 代工型號說明
The Surfscan® SP1 is an unpatterned surface inspection system that provides the sensitivity, repeatability, surface quality measurements and throughput capabilities required for 0.18 µm process technologies and beyond. It is designed for wafer, equipment and IC manufacturers. The SP1 provides 0.08 µm sensitivity on well-polished silicon at 95% capture, as well as throughputs of up to 150 wph on 200 mm wafers, and up to 100 wph on 300 mm wafers.文檔
無文檔
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
108433
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SP1 CLASSIC
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
108433
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
KLA SP1 (USA)配置
無配置OEM 代工型號說明
The Surfscan® SP1 is an unpatterned surface inspection system that provides the sensitivity, repeatability, surface quality measurements and throughput capabilities required for 0.18 µm process technologies and beyond. It is designed for wafer, equipment and IC manufacturers. The SP1 provides 0.08 µm sensitivity on well-polished silicon at 95% capture, as well as throughputs of up to 150 wph on 200 mm wafers, and up to 100 wph on 300 mm wafers.文檔
無文檔