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描述
Frame配置
無配置OEM 代工型號說明
The eV300 defect review system, an advanced, automated SEM designed to gather defect excursion information, analyze and report the results with the improved sensitivity required at smaller design rules. The eV300 supplements optical review by providing topographical information, enabling more accurate defect classification than can be achieved by optical review systems alone.文檔
KLA
eV300
類別
Defect Inspection
上次驗證: 超過30天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
124111
晶圓尺寸:
未知
年份:
未知
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