概述

IS3000 is a state-of-the-art dark-field type inspection system for detecting wafer pattern defects. While maintaining high throughput—the advantage of a dark-field-type defect-detection inspection device—the IS3000 is a ground-breaking detection device that surpasses conventional darkfield types in that it can also detect parts of shape defects and foreign bodies in places other than the top wafer surface (such as between interconnections and in contact holes).