描述
CVD配置
CVDOEM 代工型號說明
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.文檔
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TEL / TOKYO ELECTRON
TRIAS SPA
已驗證
類別
CVD (Metalization)
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
15010
晶圓尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TRIAS SPA
已驗證
類別
CVD (Metalization)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
15010
晶圓尺寸:
12"/300mm
年份:
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
CVD配置
CVDOEM 代工型號說明
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.文檔
無文檔