描述
無描述配置
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEM 代工型號說明
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TEL / TOKYO ELECTRON
MB2 730HT
已驗證
類別
CVD (Metalization)
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
28938
晶圓尺寸:
8"/200mm
年份:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
MB2 730HT
已驗證
類別
CVD (Metalization)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
28938
晶圓尺寸:
8"/200mm
年份:
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEM 代工型號說明
未提供文檔
無文檔