描述
Developer配置
– SMIF Load – (2) DEV Develop Process Stations – CWH Cup Washer Holder – (2) TRS Trasfer Stations – (2) SMIF I/O – Bowl 1: (2) NDL Nozzle, FIRM Surfactant, H2O Rinse – Bowl 2: GP nozzle, H2O Rinse, No bake/cool platesOEM 代工型號說明
The CLEAN TRACK™ ACT™ M incorporates three separate high-performance application modules: photomask developer, resist coater, and PEB (Post-Exposure Bake) oven. The system provides sophisticated process control and techniques in the photomask manufacturing process to meet the advanced requirements from industry for OPC(Optical Proximity Correction), phase shifting, and the use of chemical amplification resists. The system extends TEL's long-standing semiconductor and FPD coating and developing technology, and achieves high reliability by adopting CLEAN TRACK™ ACT™ technology.文檔
無文檔
TEL / TOKYO ELECTRON
ACT M
已驗證
類別
Coaters & Developers
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
31267
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
ACT M
已驗證
類別
Coaters & Developers
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
31267
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Developer配置
– SMIF Load – (2) DEV Develop Process Stations – CWH Cup Washer Holder – (2) TRS Trasfer Stations – (2) SMIF I/O – Bowl 1: (2) NDL Nozzle, FIRM Surfactant, H2O Rinse – Bowl 2: GP nozzle, H2O Rinse, No bake/cool platesOEM 代工型號說明
The CLEAN TRACK™ ACT™ M incorporates three separate high-performance application modules: photomask developer, resist coater, and PEB (Post-Exposure Bake) oven. The system provides sophisticated process control and techniques in the photomask manufacturing process to meet the advanced requirements from industry for OPC(Optical Proximity Correction), phase shifting, and the use of chemical amplification resists. The system extends TEL's long-standing semiconductor and FPD coating and developing technology, and achieves high reliability by adopting CLEAN TRACK™ ACT™ technology.文檔
無文檔