描述
Single Block (Resist Coater/Developer)配置
無配置OEM 代工型號說明
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).文檔
無文檔
TEL / TOKYO ELECTRON
LITHIUS
已驗證
類別
Coaters & Developers
上次驗證: 29 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
104599
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
LITHIUS
類別
Coaters & Developers
上次驗證: 29 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
104599
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Single Block (Resist Coater/Developer)配置
無配置OEM 代工型號說明
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).文檔
無文檔