描述
Cluster Spin Coater System配置
configured for 97mm disk, 380V, 3ph, 60Hz, w/ coater module, thermal module w/ 2ea hotplates, 1ea chillplate, 2ea vacuum plate; alignment module. Includes: media storage tank; Julabo F30-CL recirculating chiller; Thermo Neslab RTE7 recirculating chiller, power cabinet; manuals. 50in x 48in x 80in H.OEM 代工型號說明
Priming + Spin Coating + Spray Coating + Baking + Development up to 200 mm文檔
無文檔
類別
Coaters & Developers
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147628
晶圓尺寸:
未知
年份:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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類別
Coaters & Developers
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147628
晶圓尺寸:
未知
年份:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Cluster Spin Coater System配置
configured for 97mm disk, 380V, 3ph, 60Hz, w/ coater module, thermal module w/ 2ea hotplates, 1ea chillplate, 2ea vacuum plate; alignment module. Includes: media storage tank; Julabo F30-CL recirculating chiller; Thermo Neslab RTE7 recirculating chiller, power cabinet; manuals. 50in x 48in x 80in H.OEM 代工型號說明
Priming + Spin Coating + Spray Coating + Baking + Development up to 200 mm文檔
無文檔