描述
The device is disassembled and stored in a warm and dry warehouse. Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity (depending on configuration and layer structure): up to 1200 substrates per hour Cycle time: < 3 seconds Dimensions and weight of the system: Main system dimensions: L × W × H [cm] = 335 × 225 × 155 Main system weight: 3.3 t Media supply: Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen High voltage Compressed air Cooling water配置
無配置OEM 代工型號說明
未提供文檔
無文檔
類別
Coaters & Developers
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
134375
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
SOLARIS S151
類別
Coaters & Developers
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
134375
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
The device is disassembled and stored in a warm and dry warehouse. Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity (depending on configuration and layer structure): up to 1200 substrates per hour Cycle time: < 3 seconds Dimensions and weight of the system: Main system dimensions: L × W × H [cm] = 335 × 225 × 155 Main system weight: 3.3 t Media supply: Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen High voltage Compressed air Cooling water配置
無配置OEM 代工型號說明
未提供文檔
無文檔