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APPLIED MATERIALS (AMAT) REFLEXION
    描述
    Cleaning Side Only - Polishing Side Not Included Details attached
    配置
    Walking Beam Assembly Input Station Transfer Robot: Brooks Model: WTM-511-2-FWS02-V1-CU Delivery Tank: Megasonic Tank Megasonics Delivery Type: 2 x Pressurized Vessel Megasonic Generator: 600W 2ea Megasonic Heater Brush 1 Delivery: Pressurized Vessel Brush 2 Delivery: Pressurized Vessel Heater Lamp SRD Exhaust & Drain Lines: Single Output station SRD Finger Orion Controller
    OEM 代工型號說明
    The Applied Reflexion CMP system is Applied Materials' 300mm CMP platform delivering innovation and productivity for 100nm and beyond. Based on the production-proven Applied Mirra Mesa CMP architecture, the Applied Reflexion system offers 300mm processing capabilities for oxide, STI, polysilicon, tungsten, and copper applications. Titan Head technology delivers excellent dishing and erosion performance with better repeatability. The system's FullScan endpoint system enables superior process results by scanning the entire wafer. Applied Reflexion's cleaner offers a two-stage brush scrub with single-wafer megasonics in vertical orientation to minimize footprint. Its space efficient design also features factory automation and advanced process control with integrated film thickness metrology and particle monitoring options, as well as a dual wafer robot which increases tool throughput for thin films.
    文檔

    APPLIED MATERIALS (AMAT)

    REFLEXION

    verified-listing-icon

    已驗證

    類別
    CMP

    上次驗證: 超過60天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    Deinstalled


    產品編號:

    104465


    晶圓尺寸:

    12"/300mm


    Robot:
    Brooks Automation: WTM-511-2-FWS02-V1-CU

    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    APPLIED MATERIALS (AMAT) REFLEXION

    APPLIED MATERIALS (AMAT)

    REFLEXION

    CMP
    年份: 0條件: 二手
    上次驗證超過60天前

    APPLIED MATERIALS (AMAT)

    REFLEXION

    verified-listing-icon
    已驗證
    類別
    CMP
    上次驗證: 超過60天前
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    關鍵商品詳情

    條件:

    Used


    作業狀態:

    Deinstalled


    產品編號:

    104465


    晶圓尺寸:

    12"/300mm


    Robot:
    Brooks Automation: WTM-511-2-FWS02-V1-CU

    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    Cleaning Side Only - Polishing Side Not Included Details attached
    配置
    Walking Beam Assembly Input Station Transfer Robot: Brooks Model: WTM-511-2-FWS02-V1-CU Delivery Tank: Megasonic Tank Megasonics Delivery Type: 2 x Pressurized Vessel Megasonic Generator: 600W 2ea Megasonic Heater Brush 1 Delivery: Pressurized Vessel Brush 2 Delivery: Pressurized Vessel Heater Lamp SRD Exhaust & Drain Lines: Single Output station SRD Finger Orion Controller
    OEM 代工型號說明
    The Applied Reflexion CMP system is Applied Materials' 300mm CMP platform delivering innovation and productivity for 100nm and beyond. Based on the production-proven Applied Mirra Mesa CMP architecture, the Applied Reflexion system offers 300mm processing capabilities for oxide, STI, polysilicon, tungsten, and copper applications. Titan Head technology delivers excellent dishing and erosion performance with better repeatability. The system's FullScan endpoint system enables superior process results by scanning the entire wafer. Applied Reflexion's cleaner offers a two-stage brush scrub with single-wafer megasonics in vertical orientation to minimize footprint. Its space efficient design also features factory automation and advanced process control with integrated film thickness metrology and particle monitoring options, as well as a dual wafer robot which increases tool throughput for thin films.
    文檔
    類似上架商品
    查看全部
    APPLIED MATERIALS (AMAT) REFLEXION

    APPLIED MATERIALS (AMAT)

    REFLEXION

    CMP年份: 0條件: 二手上次驗證:超過60天前
    APPLIED MATERIALS (AMAT) REFLEXION

    APPLIED MATERIALS (AMAT)

    REFLEXION

    CMP年份: 0條件: 二手上次驗證:28 天前
    APPLIED MATERIALS (AMAT) REFLEXION

    APPLIED MATERIALS (AMAT)

    REFLEXION

    CMP年份: 2006條件: 二手上次驗證:超過60天前