描述
6 to 12 inch depending on model Resolution: 3nm R&D to mass production配置
無配置OEM 代工型號說明
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.文檔
無文檔
HITACHI
S-9300
類別
CD-SEM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
131702
晶圓尺寸:
6"/150mm, 8"/200mm, 12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
6 to 12 inch depending on model Resolution: 3nm R&D to mass production配置
無配置OEM 代工型號說明
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.文檔
無文檔