描述
-The tool is configured for 150 mm -Minor issue with an unstable high‑voltage module, but it can be repaired by the OEM配置
無配置OEM 代工型號說明
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.文檔
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HITACHI
S-9260A
類別
CD-SEM
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
142218
晶圓尺寸:
6"/150mm, 8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
-The tool is configured for 150 mm -Minor issue with an unstable high‑voltage module, but it can be repaired by the OEM配置
無配置OEM 代工型號說明
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.文檔
無文檔