描述

Software Version: NA CIM: GEM Process: CD MEASUREMENT

配置

CDSEM Hardware Configuration System Type Description Quantity Status Main System Main tool 1 OK Options System Optic system OK Others OK Factory Interface SMIF 2 OK Handler System Robot system 1 OK

OEM 代工型號說明

The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.