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描述
無描述配置
-Configured for 8 inch (6" wafer sizes possible) -SW Version: 11 Options list: SECS Multipoint Measurement Hole Measurement Reduced Scan Image Database CP Controller Save to DOS FD IP Read Operator AccessoriesOEM 代工型號說明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.文檔
無文檔
HITACHI
S-7840
類別
CD-SEM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
54796
晶圓尺寸:
8"/200mm
年份:
2001
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描述
無描述配置
-Configured for 8 inch (6" wafer sizes possible) -SW Version: 11 Options list: SECS Multipoint Measurement Hole Measurement Reduced Scan Image Database CP Controller Save to DOS FD IP Read Operator AccessoriesOEM 代工型號說明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.文檔
無文檔