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GLEN TECHNOLOGIES R3A
  • GLEN TECHNOLOGIES R3A
  • GLEN TECHNOLOGIES R3A
  • GLEN TECHNOLOGIES R3A
  • GLEN TECHNOLOGIES R3A
  • GLEN TECHNOLOGIES R3A
  • GLEN TECHNOLOGIES R3A
描述
The Glen R3A Plasma Cleaning System is PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. This 500 watt plasma cleaner has two 14 x 14-inch electrode sets (capable of up to 8 sample trays) which can be quickly configured to provide any of these three plasma modes: Active Plasma for routine cleaning of sample surfaces; RIE Plasma for aggressive cleaning of non ESD sensitive samples; and Downstream, Electron-Free Plasma for cleaning sensitive electronic components normally associated with the semiconductor industry. The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence with two computer selected plasma gas inputs and a connection for a backfill gas (typically nitrogen). The Glen R3A has RS 232 interface as standard. - System Power Source: Advanced Energy PE-1000 AC Plasma Power Source; 1KW @ 40kHz - Electrodes: Qty-2 14 x 14-inch electrode sets; capable of up to 8 sample trays - 3 Plasma Modes: ACTIVE PLASMA for routine cleaning of sample surfaces; RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; and DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components - Gas Inputs: Computer-controlled; 2 process gases, 1 purge gas - Computer Interface: RS 232 interface - Power Requirements: 110Volt / 60Hz / 1Phase - Full Load Current Rating: 13 Amp
配置
無配置
OEM 代工型號說明
未提供
文檔

無文檔

類別
Ashers / Plasma Cleaner

上次驗證: 超過60天前

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

125849


晶圓尺寸:

未知


年份:

2001


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

GLEN TECHNOLOGIES

R3A

verified-listing-icon
已驗證
類別
Ashers / Plasma Cleaner
上次驗證: 超過60天前
listing-photo-af44d7365dd14c6d9b1dbecbefa38510-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1878/af44d7365dd14c6d9b1dbecbefa38510/aaf73cdf2c9c4330a20d6a4991941eac_screenshot20250321at9_mw.png
listing-photo-af44d7365dd14c6d9b1dbecbefa38510-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1878/af44d7365dd14c6d9b1dbecbefa38510/d310ecfba4f0411aaa2452d1e7d7c67b_screenshot20250321at9_mw.png
listing-photo-af44d7365dd14c6d9b1dbecbefa38510-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1878/af44d7365dd14c6d9b1dbecbefa38510/0c4bf66543bf44c6ae84cb551b7d5a96_screenshot20250321at9_mw.png
listing-photo-af44d7365dd14c6d9b1dbecbefa38510-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1878/af44d7365dd14c6d9b1dbecbefa38510/66396a98d5844f5884085277e7c00ed0_screenshot20250321at9_mw.png
listing-photo-af44d7365dd14c6d9b1dbecbefa38510-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1878/af44d7365dd14c6d9b1dbecbefa38510/89aca82d93444ca990b8a521e8869b63_screenshot20250321at9_mw.png
listing-photo-af44d7365dd14c6d9b1dbecbefa38510-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1878/af44d7365dd14c6d9b1dbecbefa38510/cc2b183438ca48a1bfa99ff6441d79b1_screenshot20250321at9_mw.png
關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

125849


晶圓尺寸:

未知


年份:

2001


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
The Glen R3A Plasma Cleaning System is PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. This 500 watt plasma cleaner has two 14 x 14-inch electrode sets (capable of up to 8 sample trays) which can be quickly configured to provide any of these three plasma modes: Active Plasma for routine cleaning of sample surfaces; RIE Plasma for aggressive cleaning of non ESD sensitive samples; and Downstream, Electron-Free Plasma for cleaning sensitive electronic components normally associated with the semiconductor industry. The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence with two computer selected plasma gas inputs and a connection for a backfill gas (typically nitrogen). The Glen R3A has RS 232 interface as standard. - System Power Source: Advanced Energy PE-1000 AC Plasma Power Source; 1KW @ 40kHz - Electrodes: Qty-2 14 x 14-inch electrode sets; capable of up to 8 sample trays - 3 Plasma Modes: ACTIVE PLASMA for routine cleaning of sample surfaces; RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; and DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components - Gas Inputs: Computer-controlled; 2 process gases, 1 purge gas - Computer Interface: RS 232 interface - Power Requirements: 110Volt / 60Hz / 1Phase - Full Load Current Rating: 13 Amp
配置
無配置
OEM 代工型號說明
未提供
文檔

無文檔